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ALD Equipment #1

ALD Equipment #2

ALD Equipment #3

Schematic Configuration

KakaoTalk_20240613_150404192_01.jpg

Specification

  • Thermal ALD, Travelling type, Max 6''

  • Precursor: DEZ, TmG, DADI + O3

  • Deposition Temp: 100 ~ 300 °C

Capacitor Fromation Equipment

Electrical Characterization Equipment

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